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The tool subresgen applies space3d with the
boundary-element method for substrate resistance extraction
to compute substrate resistances for some standard substrate
terminal configurations. These substrate resistances are
then used to generate "selfsubres" and
"coupsubres" entries in a space element definition
file that can be used with space3d to extract
substrate substrate resistances using the fast interpolation
method. The command subresmkdir creates a working
directory for subresgen.
The application is described in more detail below.
STEP 1.
Create an element definition file called
"space.def.s" for space3d that contains at
least an entry "sublayers" that describes the
profile of the substrate that you consider (see the
"Space Substrate Resistance Extraction User's
Manual"). It is important for subresgen that the
keyword "sublayers" starts at the beginning of a
line, and that the body of the sublayers entry does not
contain empty lines. Further, the body should be followed by
an empty line. The same should hold for possible entries
"selfsubres" and "coupsubres" that are
contained by the file. But note that these entries will be
overwritten by subresgen.
STEP 2.
Run subresmkdir to create a working directory for
subresgen. As a first argument you need to specify
the name of the working directory. As a second argument you
need to specify (in nm) the minimum size of a substrate
terminal. Move the file "space.def.s" to the
working directory that you created with
subresmkdir.
STEP 3.
Run subresgen in the working directory that you
created with subresmkdir. You will see that messages
appear about the space3d runs that are performed to
compute the substrate resistances. At the end, the element
definition file "space.def.s" will be modified to
contain the "selfsubres" and
"coupsubres" entries.
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